| User's Guide for RM 8096 and 8097: The MEMS 5-in-1, 2013 Edition Contributor(s): U. S. Department of Commerce (Author) |
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ISBN: 1499211937 ISBN-13: 9781499211931 Publisher: Createspace Independent Publishing Platform OUR PRICE: $18.99 Product Type: Paperback Published: April 2014 |
| Additional Information |
| BISAC Categories: - Reference |
| Physical Information: 0.53" H x 8.5" W x 11.02" (1.31 lbs) 254 pages |
| Descriptions, Reviews, Etc. |
| Publisher Description: The Microelectromechanical Systems (MEMS) 5-in-1 is a reference device sold as a NIST Reference Material (RM) that contains MEMS test structures on a test chip. The two RM chips (8096 and 8097) provide for both dimensional and material property measurements. RM 8096 was fabricated on a multiuser 1.5 m complementary metal oxide semiconductor (CMOS) process followed by a bulkmicromachining etch. Material properties of the composite oxide layer are reported on the RM Report of Investigation and described within this guide.3 RM 8097 was fabricated using a polysilicon multi-user surface-micromachining MEMS process with a backside etch. The material properties of the first or second polysilicon layer are reported on the RM Report of Investigation and described within this guide. |